1 Introduction
At present, the manufacturing industry has undergone a revolutionary transformation, and modern manufacturing technology based on CNC machine tools is moving in the direction of high-speed, dry cutting. In this field, the development of cutting tool manufacturing technology is of paramount importance. Due to the tool coating technology, the comprehensive performance of the cutting tool can be greatly improved, especially in recent years, the concept of super-hard film design can effectively improve the high-temperature performance of the tool, and the coated tool can be applied to high-speed and dry type. Machining is possible. Under the influence of the increasing popularity of CNC machine tools, the concept of modern advanced manufacturing technology and the country's vigorous promotion of energy-saving and environmentally friendly manufacturing models, since 2000, domestic tool coating technology has set off a second development boom, with a focus on various types of development. PVD technology. The colleges and universities have designed and characterized super-hard films as the main research direction, and the socially-developed tool coating processing service center has become the mainstream of the domestic tool coating industry. Although the level of domestic tool coating technology is still lagging behind, the popularity and demand of the application market have far exceeded the expected results. Therefore, the high-level and stable tool coating technology is extremely eager for the domestic tool industry. If the domestic original technology can be developed, a wide range of tool coating processing service systems can be formed in the short-term, and it will bring huge Social and economic benefits.
2 Overview of domestic commercial application PVD technology
The research and development of domestic PVD coating technology began in the early 1980s. In the mid-1980s, the small and medium-sized hollow cathode ion coating machine and the high-speed steel tool TiN coating technology were successfully developed. Due to the promising prospects of the tool coating market, hot cathode ion plating and cathodic arc (multi-arc) ion plating technology and equipment have been introduced in China. The introduction of technology and equipment has spurred the first development boom of domestic tool PVD coating technology. The domestic vacuum equipment factories and research institutes have started the development of ion coating machines, and developed various kinds in the early 1990s. PVD equipment. However, due to the low performance index of most equipment, the poor stability of the coating process, and the expected market benefits have not been realized, which has led to the stagnation of domestic tool PVD coating technology for more than a decade. Although the cemented TiN-TiCN-TiN multi-component coating technology was successfully developed in the late 1990s and reached a practical level, it was not recognized by the market in the subsequent development process. With the rapid rise of China's automobile industry, the introduction of advanced manufacturing technology and the widespread use of CNC machining technology, PVD technology has set off a second development boom in China since the beginning of this century. Different from the 1990s, the development of domestic PVD technology is more diverse and innovative. It can be summarized as follows:
1 Cathode Arc Deposition (Cathode Arc Deposition) has been developed from small round cathode arc technology to large area cathodic arc technology and cylindrical target cathodic arc technology. It is mainly used for the preparation of films such as TiAlN.
2 Hot Cathode Plating is a technology derived from Balzers and is mainly used for the preparation of films such as TiN.
3 Magnetron Sputter Plating In recent years, magnetron sputtering technology has been the key development direction of the domestic coating industry. Unbalanced magnetron sputtering technology, magnetron sputtering and auxiliary ion source technology have emerged. Etc., various types of films can be prepared.
4 Magnetron sputtering additional cathodic arc method has been widely used in China and can be used in the preparation of various films.
5 Hollow cathode additional magnetron sputtering and cathodic arc method Hollow cathode is a traditional technology in China, and its application market still exists. In order to give full play to the characteristics of this technology, domestic researchers have combined hollow cathodes with magnetron sputtering technology and cathodic arc technology for the preparation of multi-layer films, and this new attempt has had an impact on the market.
In summary, the domestic tool coating technology development is still based on TiAlN film. The above various technologies have been able to produce a variety of layers on the cutting tool, including TiAlN film, but what is lacking is the application-based research and The guarantee of industrial production process stability.
3 Current hot spots in domestic thin film technology research
In recent years, nano-super hard film technology has become a hot spot in the research and development of coatings. Since 2000, it has entered the stage of continuous development in China. The superhard film is defined as having a hardness of more than 40 GPa. It is well known that the intrinsic hardness of a superhard film such as diamond, cubic boron nitride, or amorphous diamond-like has been studied and applied for a long time, but the film itself is Some features restrict the expansion of the application area. For example, the diamond film is not suitable for the cutting process of the iron-based material, and the cubic boron nitride film is difficult to be combined with the tool base, easy to peel off, and the high-purity c-BN is difficult to prepare, and has not yet reached the commercial application level. Therefore, in recent years, the development of thin film technology has focused more on the study of extrinsic superhard membranes. The superhardness and mechanical properties of the extrinsic hardness superhard film mainly come from the properties of their compositions and the ultrafine microstructure. The composition is mostly oxides, carbides, nitrides and borides, and its microstructure. It has reached the order of nanometers.
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